MEMS SENSORS & MANUFACTURING
Triton designs, engineers and manufactures MEMS-based sensors and other devices for industrial, medical and defense applications. Our high efficient and vertically integrated MEMS fabrication facility allows our customers to rapidly and cost-effectively transition a product through prototyping into quality-system driven production.
Capabilities Include:
- Photolithographic Stepper (5:1)
- Front & Backside Contact Aligner
- E-beam Lithography
- High Selectivity Deep Ion Reactive Etching
- Metal and Dielectric Wet Etching
- Anisotropic Si Etching
- Oxide ICP
- Metal Sputter & Evaporation Deposition
- Atomic Layer Deposition
- PECVD
- Critical Dimension Analysis
- Surface Profilometry
- Film Stress Measurement
- SEM with CD Capability
- Automated Electrical Wafer Probe
- Automated Wafer Dicing
- Epoxy and Solder Die Attachment
Triton’s MEMS Quality System integrates Process Control Planning, Gauge Capability, Statistical Process Control and Process Failure Mode Effects Analysis (pFMEA) for both development and manufacturing.