MEMS SENSORS & MANUFACTURING

Triton designs, engineers and manufactures MEMS-based sensors and other devices for industrial, medical and defense applications. Our high efficient and vertically integrated MEMS fabrication facility allows our customers to rapidly and cost-effectively transition a product through prototyping into quality-system driven production.

Capabilities Include:

• Photolithographic Stepper (5:1)
• Front & Backside Contact Aligner
• E-beam Lithography
• High Selectivity Deep Ion Reactive Etching
• Metal and Dielectric Wet Etching
• Anisotropic Si Etching
• Oxide ICP
• Metal Sputter & Evaporation Deposition
• Atomic Layer Deposition
• PECVD
• Critical Dimension Analysis
• Surface Profilometry
• Film Stress Measurement
• SEM with CD Capability
• Automated Electrical Wafer Probe
• Automated Wafer Dicing
• Epoxy and Solder Die Attachment

Triton’s MEMS Quality System integrates Process Control Planning, Gauge Capability, Statistical Process Control and Process Failure Mode Effects Analysis (pFMEA) for both development and manufacturing.